2020年3月17日星期二
Coplanar Integration of Lattice-Mismatched Semiconductors with Silicon by Wafer Bonding Ge / Si1 − x Ge x / Si Virtual Substrates
We have demonstrated a general process which could be used for the integration of lattice-mismatched semiconductors onto large, Si-sized wafers by wafer bonding
virtual substrates. The challenges for implementing this procedure for large diameter Ge-on-insulator (GOI) have been identified and solved, resulting in the transfer of epitaxial
to a Si wafer. We found that planarization of
Ge
virtual
substrates
was a key limiting factor in the transfer process. To circumvent this problem, an oxide layer was first deposited on the Ge film before planarization using a standard oxide chemical mechanical planarization process. The GOI structure was created using
-induced layer exfoliation (Smartcut™) and a buried
etch-stop layer, which was used to subsequently remove the surface damage with a hydrogen peroxide selective etch. After selective etching, the crosshatched surface morphology of the original virtual substrate was preserved with roughness of <15 nm rms as measured on a
scale and a
scale roughness of
Using an etch-stop layer, the transferred device layer thickness is defined epitaxially allowing for future fabrication of ultrathin GOI as well as III-V films directly on large-diameter Si wafers. © 2004 The Electrochemical Society. All rights reserved.
Source:IOPscience
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