Novel silicon photonics applications
requiring heavy n-type doping have recently driven a great deal of interest
towards the phosphorous doping of germanium. In this work we report on infrared
reflectance spectroscopy measurements of the electron density in heavily n-type
doped germanium layers obtained by stacking multiple phosphorous δ-layers.
Here, we demonstrate that the conventional Drude model of the electrodynamic
response of free carriers in metals can be adapted to describe heavily doped
semiconductor thin films. Consequently, the effect of the electron density on
the plasma frequency, scattering rate and complex permittivity can be
investigated.
Source:IOPscience
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